华中科技大学 硕士学位论文 基于三维步距规的数控机床几何误差辨识研究 姓名：丁明宇 申请学位级别：硕士 专业：机械电子工程 指导教师：李斌;李作清 20070130 华华 中中 科科 技技 大大 学学 硕硕 士士 学学 位位 论论 文文 I 摘 要 数控机床的误差测量是误差补偿的关键。 本文针对一种新型数控机床精度检测装置 三维步距规进行研究，建立了三轴数控机床的误差模型，对三维步距规测量机床误 差的特性进行了深入的探讨。主要内容包括一下几方面： 首先，分析了国内外数控机床误差测量以及误差建模的现状，明确了数控机床误差 测量的主要目的和方法。分析了各种误差测量仪器的优缺点，说明了开发三维步距规装 置测量误差的重要性。 其次，对三维步距规装置的具体结构进行了说明；介绍了三维步距规装置的误差测 量原理， 详细推导了装置的空间离散点微位移测量以及空间步距间偏离位移测量计算公 式。分析了装置的误差测量精度，确定了各项因素，尤其是装置制造误差和安装误差对 装置测量精度影响。 再者，对三维步距规装置的标定和测量方法进行了研究。对锥体系数标定方法进行 了研究和实验，分析了锥体系数标定过程中锥体制造误差对测量精度的影响。分析了装 置测量过程中二次装夹引入测量误差的原因， 提出了通过对装夹姿态的限制减小测量误 差的方法。 还对装置测量过程中可能对装置测头传感器造成损害的一些操作作了详细说 明。 最后，对三维步距规装置进行数控机床误差测量试验验证，在分别完成位置标定与 位置测量后，计算出了测量机床相对于标定机床的误差值。同时，还进行了平面光栅测 量机床误差的实验，为验证三维步距规装置误差测量的准确性提供了依据。通过对比两 种仪器得出的实验数据，证明三维步距规装置在机床误差测量方面具有较高的精度。结 合数控机床的误差辨识模型， 推导出基于三维步距规的数控机床空间几何单项误差分离 辨识的误差模型。 为数控机床出厂精度检验以及使用后期精度恢复提供了参考和补偿的 依据。 三维步距规装置具有方便快捷， 测量精度高， 测量成本低等特点非常适合推广应用， 对提高机床制造精度具有重要意义。 关键词关键词：数控机床 三维步距规 几何误差测量 几何误差辨识 几何误差建模 华华 中中 科科 技技 大大 学学 硕硕 士士 学学 位位 论论 文文 II Abstract The measuring of numerical control machine tools volumetric error is the key point of error compensation, this paper research on a new measuring equipment used for machine tools precision inspecting named three dimensional stop-gauge. A error model for three axis NC machine tools is founded, and the characters of the three dimensional stop-gauge when it is used to measuring the machine tools volumetric error are deeply discussed. The mainly aspects of this paper are as follows: First, the actuality of error measuring and error modeling in and outside our country is discussed, the aim and the method of machine tools error measuring has been nailed down. The advantages and disadvantages of every error measuring equipment are analyzed, in order to explain the essentiality of empolder the three dimensional stop-gauge equipment. Secondly, the detailed structure of the three dimensional stop-gauge is explained, the principle of the three dimensional stop-gauge is introduced and the formula of measuring the micro-displacement of the spatial discrete point and measuring the departure of the spatial step are detailedly analyzed. Meanwhile, the measuring accuracy of the equipment and confirmed the influence of the measuring accuracy especially caused by the equipments manufacturing error and the equipment installing error are analyzed. Thirdly, the calibration method and measuring method of the three dimensional stop-gauge has been researched. The experiment on coefficient calibration of cone is carried out, the influence of the measuring accuracy of the equipment caused by the manufacturing accuracy of the cone is validated. When using the equipment the measuring error may be inducted in because of the twice installments during the measuring process, the measuring error can be sharply reduced by limiting the pose of the equipment. An notice of using the measuring probe sensor devices which may cause damage to some of operation is given described in details. Finally, the experiments on validating the accuracy of the three dimensional stop-gauge have been carried out. The volumetric error between the calibrating machine tools and the measuring machine tools has been calculated out after the step distance calibrating and step distance measuring. Then, use the cross grid encoder to measuring out two machine tools errors, according to the result compared with the three dimensional stop-gauges error 华华 中中 科科 技技 大大 学学 硕硕 士士 学学 位位 论论 文文 III measuring data we may know the accuracy of the error measuring equipment. It is proofed that the three dimensional stop-gauge have high precision in machine tools volumetric error measuring. Combined with the error identification model of the NC machine tools, the volumetric error identify model of the NC machine tools based on the three dimensional stop-gauge was introduced. It is very helpful to the NC machine tools accuracy checks when the new products leave factory and the error compensation of the old NC machine tools accuracy renew. The three dimensional stop-gauge has characteristics of convenient，high precision of error measuring and low cost, it is very suitable to be applied and it is very important to enhance the accuracy of machine tools machining. Key words：NC machine tools The three dimensional stop-gauge Geometrical error measuring Geometrical error identification Geometrical error modeling 独创性声明 本人声明所呈交的学位论文是我个人在导师指导下进行的研究工作及取得的研 究成果。尽我所知，除文中已经标明引用的内容外，本论文不包含任何其他个人或 集体已经发表或撰写过的研究成果。对本文的研究做出贡献的个人和集体，均已在 文中以明确方式标明。本人完全意识到本声明的法律结果由本人承担。 学位论文作者签名： 日期： 年 月 日 学位论文版权使用授权书 本学位论文作者完全了解学校有关保留、使用学位论文的规定，即：学校有权 保留并向国家有关部门或机构送交论文的复印件和电子版， 允许论文被查阅和借阅。 本人授权华中科技大学可以将本学位论文的全部或部分内容编入有关数据库进行检 索，可以采用影印、缩印或扫描等复制手段保存和汇编本学位论文。 本论文属于 （请在以上方框内打“”） 学位论文作者签名： 指导教师签名： 日期： 年 月 日 日期： 年 月 日 保密，在 年解密后适用本授权书。 不保密。 华华 中中 科科 技技 大大 学学 硕硕 士士 学学 位位 论论 文文 1 1 绪 论 1.1 课题来源 本课题来源于国家重点基础研究发展计划(973 计划)项目：数字化制造基础研究课 题一“高速数控机床动态行为演变及其高精度控制(课题编号：2005CB724101)” ，国家 863 计划：数控机床误差智能补偿装置(项目编号：2002AA423260)，和国