河南科技大学毕业论文-化工 071 王艳I摩擦副对不含氢 GLC 薄膜摩擦学性能的影响摘 要本文通过非平衡磁控溅射沉积离子镀膜的方法制备了 GLC 薄膜，在旋转式球-盘摩擦磨损试验机上考察了对偶材料对 GLC 薄膜的摩擦性能的影响。在摩擦完毕后，采用扫描电镜对磨痕形貌进行了观察，使用非接触式三维表面轮廓仪测量了磨痕深度和宽度并对磨损率进行了计算分析。研究结果表明：1、固定载荷,随着速度的增大，GLC/GCr15 体系的摩擦系数逐渐减小，比磨损率由小变大后又变小；GLC/Si3N4、GLC/Al2O3体系的摩擦系数则逐渐增大，比磨损率则大体上呈增大趋势。2、固定速度，随着载荷的增大，三个体系的摩擦系数均不断下降，GLC/GCr15 体系的比磨损率大体上呈下降趋势；GLC/Si3N4、GLC/Al2O3体系的比磨损率则不断增大。关键词：GLC 薄膜，速度，载荷，摩擦，磨损河南科技大学毕业论文-化工 071 王艳IIEFFECT OF COUNTERPART MATERIALS ON TRIBOLOGICAL PROPERTIES OF H-FREE GLC FILMSABSTRACTH-free GLC films were prepared by using an unbalanced magnetron sputtering deposition method. Effects of counterpart materials on tribological properties of GLCs were examined on a rotation-type ball-on-disc tribometer. After the tests, the wear tracks and debris were observed using a scanning electron microscope. In addition, a non-contact three-dimensional surface profiler was employed to measure the depth and width of wear tracks and to calculate the specific wear rate. The major results are shown as below: 1. As the sliding speed increases under a constant load, the friction coefficient generally decreases, but the wear rate first increases and then decreases for the GLC/GCr15 system. While for the GLC/Si3N4 and GLC/Al2O3 systems, both the friction coefficient and wear rate increase generally. 2. As the load increases at a constant sliding speed, the three systems commonly display a reduction in friction coefficient. But the wear rate does not change consistently. It decreases for the GLC/GCr15 pair but increases for the GLC/Si3N4 and GLC/Al2O3 pairs with increasing load. KEY WORDS: GLC film, speed, load, friction, wear 河南科技大学毕业论文-化工 071 王艳III目 录第一章 前 言.11.1 碳膜的发展和应用.11.1.1 碳膜的发展.11.1.2 碳膜的应用.21.2 碳膜的结构特点.31.3 碳膜的制备原理和结构表征.31.3.1 碳膜的制备原理.31.3.2 碳膜结构表征.51.4 GLC 薄膜的研究现状 .61.5 GLC 薄膜的研究意义 .81.6 本课题的研究方法.9第二章 试验设备和方法.102.1 制备 GLC 薄膜的试验设备 .102.1.1 试验装置.102.1.2 试验材料.102.1.3 制备过程.102.2 GLC 薄膜摩擦学性能的研究方法及过程 .112.2.1 试验装置.112.2.2 试验材料.122.2.3 试验方法及过程.122.3 磨损率计算.13第三章 结果与分析.143.1 GLC/GCr15 体系的摩擦磨损性能 .143.1.1 速度对 GLC/GCr15 体系摩擦磨损性能的影响.143.1.2 载荷对 GLC/GCr15 体系摩擦磨损性能的影响.173.1.3 不同载荷下 GLC 薄膜与 GCr15 对摩后的表面形貌分河南科技大学毕业论文-化工 071 王艳IV析.193.2 GLC/Si3N4体系的摩擦磨损性能.213.2.1 速度对 GLC/Si3N4摩擦磨损性能的影响.213.2.2 载荷对 GLC/ Si3N4摩擦磨损性能的影响.243.2.3 不同载荷下 GLC 薄膜与 Si3N4对磨后磨痕表面形貌分析.263.3 GLC/Al2O3体系的摩擦磨损性能.283.3.1 速度对 GLC/Al2O3体系的摩擦磨损性能的影响.283.3.2 载荷对 GLC/Al2O3体系的摩擦磨损性能的影响.313.3.3 不同速度下 GLC 薄膜与 Al2O3对磨后磨痕的表面形貌分析.333.3.4 不同载荷下 GLC 薄膜与 Al2O3对磨后磨痕的表面形貌分析.373.4 三个摩擦体系的摩擦系数和比磨损率的对比.39结论.40参考文献.41致谢.43