晶方半导体科技晶方半导体科技( (苏州苏州) )有限公司有限公司ChinaChina WaferWafer LevelLevel CSPCSP LTD.LTD.文件编号 DOC#:版次 Rev:MachineMachine forfor sopsop 生效日期 Effective:This document is the exclusive property of China Wafer Level CSP LTD. and shall not be reproduced or copied or transformed to any other format without prior permission of China Wafer Level CSP LTD. 本数据为 晶方半导体晶方半导体 专有之财产，非经许可，不得复制、翻印或转变成其它形式使用。Page 1 of 141 the process for switch on1.1 the preparation：1.1.1 check all connection are ok. 确认所有的链接都是 ok1.1.2 check that all protective equipment for the LLSEVO II is connected and make sure that this equipment functions correctly 确认所有的保护设备都已经连接，并且功能正常。1.1.3 check the operating media for the vacuum pumps确认真空泵所需的气体等是正常的1.1.4 inspect the water lines for wetness(leaks)检查水管是否漏水1.1.6 Open the drain valve first and then the supply valves.and check the water pressure to approx 4bar先开出水阀，再开供水阀，并且检查水的压力是否是 4bar，如果不是，则进行调整1.1.7 open the compressed air supply and check the static pressure at the compressed air conditioner to 6-8bar打开压缩气体的供气阀，并确认静态压力是 6-8bar。1.1.11 open the process gas supply and check the static pressure to approx 0.5bar打开制程用气体（Ar），并且确认其静态压力大约是 0.5bar1.1.12open the vent gas supply and check the static pressure to approx.1.5 bar.打开 N2 的供气阀，并且确认其静态压力大约为 1.5bar1.1.13 check that all EMERGENCY-OFF buttons are released使所有的 EMO 键都被开启1.2 the method for switch on （开机方法）1.2.1 Switch on the main switch at the power rack door from 0 to I打开电控柜上的电源主开关 （如图所示）晶方半导体科技晶方半导体科技( (苏州苏州) )有限公司有限公司ChinaChina WaferWafer LevelLevel CSPCSP LTD.LTD.文件编号 DOC#:版次 Rev:MachineMachine forfor sopsop 生效日期 Effective:This document is the exclusive property of China Wafer Level CSP LTD. and shall not be reproduced or copied or transformed to any other format without prior permission of China Wafer Level CSP LTD. 本数据为 晶方半导体晶方半导体 专有之财产，非经许可，不得复制、翻印或转变成其它形式使用。Page 2 of 141.2.2Switch on the UPS power打开 UPS 的电源开关（如图所示）1.2.3Switch on the PLC power, then the red light will shine 打开 PLC 电源，这时 PC 上的红灯将会闪烁。如图说示1.2.4 push down the RESET on the rack .1.2.5when the status is stabile in the PLC ,then Switch on the GUI power.1.2.6 waiting for the overview showing.1.27 click” push to enter”2.the process for switch off2.1Checking all processes are ended2.2check the cage is in the Load Chamber 2.3check the door of LC is closed2.4clickMiscellaneousGUI Control clickMiscellaneousGUI Control2.5clickshut down PLC PC clickshut down PLC PC 2.6clickshut down GUI PC clickshut down GUI PC晶方半导体科技晶方半导体科技( (苏州苏州) )有限公司有限公司ChinaChina WaferWafer LevelLevel CSPCSP LTD.LTD.文件编号 DOC#:版次 Rev:MachineMachine forfor sopsop 生效日期 Effective:This document is the exclusive property of China Wafer Level CSP LTD. and shall not be reproduced or copied or transformed to any other format without prior permission of China Wafer Level CSP LTD. 本数据为 晶方半导体晶方半导体 专有之财产，非经许可，不得复制、翻印或转变成其它形式使用。Page 3 of 142.7switch off the main power2.7.1switch off UPS2.7.2switch off the cooling water enter in 2.7.3switch off the cooling water out 2.7.4off the main gas valve 晶方半导体科技晶方半导体科技( (苏州苏州) )有限公司有限公司ChinaChina WaferWafer LevelLevel CSPCSP LTD.LTD.文件编号 DOC#:版次 Rev:MachineMachine forfor sopsop 生效日期 Effective:This document is the exclusive property of China Wafer Level CSP LTD. and shall not be reproduced or copied or transformed to any other format without prior permission of China Wafer Level CSP LTD. 本数据为 晶方半导体晶方半导体 专有之财产，非经许可，不得复制、翻印或转变成其它形式使用。Page 4 of 142.7.5push down all the EMO switch晶方半导体科技晶方半导体科技( (苏州苏州) )有限公司有限公司ChinaChina WaferWafer LevelLevel CSPCSP LTD.LTD.文件编号 DOC#:版次 Rev:MachineMachine forfor sopsop 生效日期 Effective:This document is the exclusive property of China Wafer Level CSP LTD. and shall not be reproduced or copied or transformed to any other format without prior permission of China Wafer Level CSP LTD. 本数据为 晶方半导体晶方半导体 专有之财产，非经许可，不得复制、翻印或转变成其它形式使用。Page 5 of 143.The process for PM1. Vent LC/MC 2. Move Cage at the middle of the way 3. Regen the Cyro pumps4. open MC 5. remove the shutter boxes 6. remove the shields inside the chamber 7. remove the parts clean on the cage and clean the spring leaves 8. clean the chamber by vacuum and IPA 9. mount all the shields and test shutter movement by cylinder switch 10.change the LC/MC sealing O-ring 11.change the electrode of the targets 12.change the targets strips 13.test the resistance between targets and electrode(more than 700kohmes) 14.clean the cathode and move back to position 15.close all safety switches 16.move cage up/down to test the O-ring 17.move cage to up position 18.open etching box and the top plate 19.remove the top plates and cage out(clean and change the shields) 20.change the shields inside the LC after clean 21.change the etching box and dark space wings 22.change the heater hood 23.mount the cage and substrate holder 24.move the etching device to stand by position 25.test the gap between the dark wings and substrate holder(3mm) 26.mount the top plate 27.pump down system 28.Game Ove