光學元件的認與使用副研究員超煌 中央研究院應用科學研究中心Optical Elementsspherical lensmirrorprismpolarizer or non- plarizing beam splittercylindrical lensfilterwindowobjectivewave plate(nm) 1240eV=)(cm /11024. 1eV-14=Optical SpectrumUV Category Terrestrial Solar UV: 290 380 nm. UV-A: 320 380 nm. Ozone is transparent. Cellular damage by photochemical reactions. UV-B: 290 320 nm. Ozone is absorptive. DNA absorbs and induces many bioeffects. UV-C: 190 290 nm. Air is transparent but ozone absorbs so heavily that we do not see this range at earth surface. Vacuum UV: 105Tp/Tsis the extinction ratio, which is the most important specification of a polarizer.air gapmultilayer dielectric coatingPolarization Optics: Polarizerlong wavelength pass filterband pass filter interference filterColor-glass filtersSpectral FiltersIinIoutIout= Iinx 10-O.D.IinIoutIout= Iinx 10-(O.D.)O.D.is optical density.Attenuation (Neutral Density) FiltersDo not touch the face of gratings! Even lens-tissue is prohibited!dnn+= sinsin)( = cosdnangular dispersionGratingmagnification (M)numerical aperture (NA)tube lengththickness of cover glassachromatic, planar focal planeM = b/aObjective LensRayleigh criterion:resolution 0.61/NANA 1/(2f/#)clearly resolvedresolution limitTo focus a laser beam, the smallest spot radius 0.82/NA.A better estimation iseffective focal lengthwfw=0Objective Lens: Resolution and Focusingg-line (436 nm)i-line (365 nm)Light Source: Mercury-Arc LampLight Source: LasersDiode-Pumped Solid-State (DPSS) LasersExcimer Lasers? XeCl: 308 nm? KrF: 248 nm? ArF: 193 nmTypical Output: Pulse duration: 10 50 nsec Pulse energy: 0.2 1.0 J/pulse Repetition rate: several hundred HzExcimer Laser and PhotolithographyLight Source: Light-Emitting Diode (LED)LED chipreflector cupanodecathodeEpoxy dome lensWavelengths of LEDs