分类号： TP241.2 密级： U D C： 编号： 12-080200-83 M 学 位 论 文 类 SCARA 并联机器人机械臂 动态分析与仿真 类 SCARA 并联机器人机械臂 动态分析与仿真 杜晓艳 指导教师姓名： 张建军 教 授 河北工业大学 申请学位级别： 硕 士 学科、专业名称： 机械工程 论文提交日期： 2012 年 3 月 论文答辩日期: 2012 年 3 月 学位授予单位： 河北工业大学 答辩委员会主席： 评 阅 人： 2012 年 3 月Dissertation Submitted to Hebei University of Technology for The Master Degree of Mechanical Manufacture and Automation MANIPULATOR DYNAMIC ANALYSIS AND SIMULATION OF SIMILAR-SCARA PARALLEL ROBOT by Du Xiaoyan Supervisor: Prof. Zhang Jianjun March 2012 This work supported by the Natural Science Foundation of Tianjin of China, No. 08JCYBJC032000, 2008-2010, and the Natural Science Foundation of China, No. 51175144, 2011-2014. 河北工业大学硕士学位论文 i 类类 SCARA 并联机器人机械臂动态分析与仿真并联机器人机械臂动态分析与仿真 摘摘 要要 柔性并联机器人比传统的刚性并联机器人在重量轻、能耗小、精度高等方面更能显示出其优越性，与此同时，在高速度、高精度运作的情况下，柔性并联机器人杆件的振动对于动平台的位置误差、方向误差有重要影响。 固有频率反映了振动系统的动力学特性，基于固有频率的机械臂结构参数优化对提高柔性机械臂的动态性能起关键性的作用。 本文研究的是一种并联机构硅片搬运机器人，在机构构型分析、工作空间、及运动学动力学分析之后，分析了机械臂动态柔性特征，研究了柔性机械臂的动力学特性、振动微分方程、固有频率影响系数、尺寸优化及有限元模态仿真等关键技术，为柔性并联机器人的结构提供了有力的参考依据。 首先，针对并联机器人的机构特点，选择位移模式，建立弹性广义坐标，计算系统的弹性动能和弹性势能，通过 Lagrange 方程推导出系统的动力学方程。 其次，针对柔性并联机器人系统动力学模型的特点，建立振动微分方程，并求系统固有频率。由机构工作中频率特性考虑，固有频率越大，机械臂工作误差越小。然后，通过分析系统内各杆刚度和转动惯量对固有频率的影响对系统各参数进行优化设计。 最后，在 ANSYS 环境下建模仿真，验证结构参数的正确可行性。进行瞬态动力学分析、模态分析，并确定结构中由此产生的应力、应变和变形。 上述研究成果为解决机器人高速度和高精度操作时的结构优化问题以及如何有效控制弹性振动、得到动平台高速运转的动态特性奠定了理论基础，进一步完善了类 SCARA动平台可连续回转并联机器人的设计理论。 关键词：关键词：类 SCARA 机器人，柔性机械臂，振动分析，固有频率，参数优化 类 SCARA 并联机器人机械臂动态分析与仿真 ii 河北工业大学硕士学位论文 iii MANIPULATOR DYNAMIC ANALYSIS AND SIMULATION OF SIMILAR-SCARA PARALLEL ROBOT ABSTRACT Flexible parallel robot shows more superiority than traditional rigid parallel robot in its light weight, small energy consumption and high precision, at the same time, In the operation of the high speed and high precision, the vibration of flexible parallel robot has the important influence for position error and direction errors of the moving platform. Natural frequency reflect the dynamic characteristics of the vibration system, structure parameters optimization of the mechanical arm based on the natural frequency plays a critical role to improve dynamic performance of the flexible manipulator. This paper is about a kind of parallel mechanism wafer handling robot, after the institutional configuration analysis, work space, kinematics and dynamics analysis, the dynamic flexible characteristics of the manipulator is analyzed. The key technology such as the dynamic characteristics of the flexible manipulator, vibration differential equation, inherent frequency influence coefficient, size optimization and finite element modal simulation have been studied. It would provide a powerful reference for flexible parallel robot physical design. First of all, according to the configuration features of parallel robot, displacement mode is chose, the flexible generalized coordinates is set up, the elastic kinetic energy and elastic potential energy of the system is calculated. Through the Lagrange equation, system dynamics equation is deduced. Secondly, in view of the characteristic of the flexible parallel robot system dynamics model, the vibration differential equation is established, and natural frequency for system is solved. This paper considerate for the work frequency characteristics of institutions, the greater the inherent frequency, the smaller the mechanical arm work error. And then, through the analysis of the natural frequency impact by the stiffness and inertia of each pole within the system, the system parameters are optimal designed. Finally, modeling and simulating in ANSYS environment, we verify the correctness and feasibility of the structural parameters, for transient dynamic analysis and modal analysis, and 类 SCARA 并联机器人机械臂动态分析与仿真 iv determine the resulting stress, strain and deformation of the structure. The research results lay the theoretical foundation to solve high speed and high precision robot operating structure optimization problem, how to effectively control the elastic vibration and get moving platform dynamic characteristics of the high speed running, and further improve the design theory of the similar-SCARA parallel manipulator with mobile platform rotating continuously. KEY WORDS: similar-SCARA robot, flexible manipulator, vibration analysis, natural requency, parameter optimization 河北工业大学硕士学位论文 v 目目 录录 第一章第一章 绪论绪论. 1 1-1 课题研究的背景. 1 1-1-1 选题的背景.