半导体词汇缩写表A/Danalog to digitalAAatomic absorptionAASatomic absorption spectroscopyABCactivity-based costingABMactivity-based managementACalternating current; activated carbonACFanisotropic conductive filmACIafter-clean inspectionACPanisotropic conductive pasteACTalternative control techniques; actual cycle timeADCanalog-to-digital converterADEadvanced development environmentADIafter-develop inspectionADTapplied diagnostic techniqueADTSEMApply/Develop Track Specific Equipment ModelAEatomic emission; acousticemission; absolute ellipsometryAECadvanced equipment controllerAECSAdvanced Equipment ControlSystem; Automated Equipment Control SystemAEIafter-etch inspection; automated equipment interfaceAEManalytical electron microscopyAESAuger emission/electron spectroscopyAFMatomic force microscopyAFPabrasive-free polishAgsilverA-GEMTFAdvanced GEM Task ForceAGVautomated guided vehicleAHFanhydrous hydrogen fluorideAHUair handling unitAIRautomated image retrievalAlaluminumALDatomic layer depositionALEatomic layer epitaxy; application logic elementALSadvanced light source; advanced low-power SchottkyAMCairborne molecular contaminationAMHSautomated material handling systemAMTadvanced manufacturing technologyAMUatomic mass unitANNartificial neural networkANOVAanalysis of varianceAOVair-operated valveAPadhesion promoterAPAadvanced performance algorithmAPCadvanced process controlAPCDadd-on pollution control deviceAPCFIAdvanced Process Control Framework InitiativeAPCVDatmospheric pressure chemical vapor depositionAPECadvanced process equipment controlAPIapplication programming interface; atmospheric pressure ionizationAPMatmospheric passivation module; acoustic plate modeAPRDLAdvanced Products Research and Development LaboratoryaPSMattenuating phase-shift maskAQIACCESS query interfaceAQLacceptable quality levelArargonARaspect ratioARAMSAutomated ReliabilityARCantireflective coatingARDEaspect ratio-dependent etchingARPAAdvanced Research Projects Agency (see DARPA)ARSangle-resolved scatteringAsarsenicAS/RSautomated storage and retrieval systemASAPAdvanced Stepper Application ProgramASICapplication-specific integrated circuitASOautomatic shutoffASPadvanced strip and passivation; advanced strip processorASRautomated send receiveATDFAdvanced ToolDevelopment FacilityATEautomatic test equipmentATGautomatic test generationATLASabbreviated test language for all systemsatmatmosphereATPadvanced technology program; adenosine triphosphate; acceptance and tool performanceATRattenuated total reflectanceAttattenuatedAugoldAVPadvanced vertical processorAVSadvanced visualization systemAWEasymptotic waveform evaluationAWISPMabove wafer in situ particle monitoringAWSadvanced wet stationBbillion; boronBabariumBARCbottom antireflective coatingBASEBoston Area Semiconductor Education (Council)BAWbulk acoustic waveBCbias contrastBDEVbehavior-level deviationBDSBrownian Dynamics SimulationBeberylliumBEOLback end of lineBESOIbonded and etchback silicon on insulatorBFbrightfieldBFGSBroyden-Fletcher- Goldfarb-Shanno optimization algorithmBFLbuffered field-effect transistor logicBGAball grid arrayBHTBrinell hardness testBibismuthBiCMOSbipolar complementary metal-oxide semiconductorBIFETbipolar field-effect transistorBIMbinary intensity maskBiMOSbipolar metal-oxide semiconductorBISTbuilt-in self-testBITbulk ion temperatureBITEbuilt-in test equipmentBMCbubble memory controllerBMDbulk micro defectBOEbuffered oxide etchantBORbottom of rangeBOSSBook of SEMI Standards; binary object storage systemBOXburied oxideBPRbeam profile reflectometry; business process reengineeringBPSGboron phosphosilicate glassBPTEOSBPSG from a TEOS sourceBrbromineBSEbackscattered electron detectionBTABbumped tape automated bondingBVbreakdown voltageCcarbonCacalciumCACIM architectureCAACIM applications architectureCABCompetitive Analysis BenchmarkingCADcomputer-aided designCADTcontrol application development toolCAEcomputer-aided engineeringCAIcomputer-assisted instructionCAMcomputer-aided manufacturingCAPScomputer-assisted problem solvingCARchemically amplified resistCARRIComputerized Assessment of Relative Risk ImpactsCASEcomputer-aided softwareengineering; computer-aided systems engineeringCATcomputer-aided testingCAWConstruction Analysis WorkgroupCAWCcryogenic aerosol wafer cleaningCBGAceramic ball grid arrayCBSchemical bottle storage areaCBTcomputer-based trainingCCchip carrier; cluster controllerCCCceramic chip carrierCCDcharge-