编号： 毕业设计(论文)外文翻译（原文）学 院： 专 业： 学生姓名： 学 号： 指导教师单位： 姓 名： 职 称： *年 * 月 * 日The technology of Microlens array injection moldingAbstract Injection molding could be used as a mass production technology for microlens arrays. It is of importance, and thus of our concern in the present study, to understand the injection molding processing condition effects on the replicability of microlens array profile. Extensive experiments were performed by varyingprocessing conditions such as flow rate, packing pressure and packing time for three different polymeric materials (PS, PMMA and PC). The nickel mold insert of microlens arrays was made by electroplating a microstructure master fabricated by a modified LIGA process. Effects of processing conditions on the replicability were investigated with the help of the surface profile measurements. Experimental results showed that a packing pressure and a flow rate significantly affects a final surface profile of the injection molded product. Atomic force microscope measurement indicated that the averaged surface roughness value of injection molded microlens arrays is smaller than that of mold insert and is comparable with that of fine optical components in practical use.1 Introduction Microoptical products such as microlenses or microlens arrays have been used widely in various fields of microoptics, optical data storages, bio-medical applications, display devices and so on. Microlenses and microlens arrays are essential elements not only for the practical applications but also for the fundamental studies in the microoptics. There have been several fabrication methods for microlenses or microlens arryas such as a modified LIGA process 1, photoresist reflow process 2, UV laser illumination 3, etc. And the replication techniques, such as injection molding, compression molding 4 and hot embossing 5, are getting more important for a mass production of microoptical products due to the cost-effectiveness. As long as the injection molding can replicate subtle microstructures well, it is surely the most cost-effective method in the mass production stage due to its excellent reproducibility and productivity. In this regard, it is of utmost importance to check the injection moldability and to determine the molding processing condition window for proper injection molding of microstructures. In this study, we investigated the effects of processing conditions on the replication of microlens arrays by the injection molding. The microlens arrays were fabricated by a modified LIGA process, which was previously reported in 6, 7. Injection molding experiments were performed with an electroplated nickel mold insert so as to investigate the effects of some processing conditions. The surface profiles of molded microlens arrays were measured, and were used to analyze effects of processing conditions. Finally, a surface roughness of microlens arrays was measured by an atomic force microscope (AFM).2 Mold insert fabricationMicrolens arrays having several different diameters were fabricated on a PMMA sheet by a modified LIGA process 6. This modified LIGA process is composed of an X-ray irradiation on the PMMA sheet and a subsequent thermal treatment. The X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens 7. The shapes of microlenses fabricated by the modified LIGA process can be predicted by a method suggested in 7.The microlens arrays used in the experiments were composed of 500m -(a 2 2 array), 300m -(2 2) and 200m (5 5) diameter arrays, and their heights were 20.81, 17.21 and 8.06 m, respectively. Using the microlens arrays fabricated by the modified LIGA process as a master, a metallic mold insert was fabricated by a nickel electroplating for the injection molding. Typical materials used in a microfabrication process, such as silicon, photoresists or polymeric materials, cannot be directly used as the mold or the mold insert due to their weak strength or thermal properties. It is desirable to use metallic materials which have appropriate mechanical and thermal properties to endure both a high pressure and a large temperature variation during the replication process. Therefore, a metallic mold insert is being used rather than the PMMA master on silicon wafer for mass production with such replication techniques. Otherwise special techniques should be adopted as a replication method, e.g. a low pressure injection molding 8.The size of final electroplated mold insert was 30 30 3 mm. The electroplated nickel mold insert having microlens